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Products · Vacuum

Industrial Vacuum Infrastructure & Gas Analyzers

Leybold rotary vane, dry, scroll, screw, Roots and turbomolecular pumps, leak detectors and gas analyzers.

Sourced from the Leybold Vacuum Components Portfolio

Industrial Fore Vacuum Pumps & Rough Vacuum Control

  • Oil-Sealed Rotary Vane Pumps (SOGEVAC & TRIVAC Lines): SOGEVAC single-stage pumps deliver 10 to 840 m³/h down to ≤ 5 · 10⁻² mbar, and TRIVAC dual-stage pumps reach 10⁻⁴ mbar (TRIVAC B, 4 to 65 m³/h). Both feature dynamic shaft seals, integrated exhaust filtration with oil loss under 1 ppm, and ATEX (2014/34/EU) or O₂-compatible versions.
  • ECODRY plus Multi-Stage Roots Pumps: 100% oil-free and particle-free compact vacuum generation (25, 35, 45 and 70 m³/h) in one compact frame under 30 kg, with adaptive speed control via a Leybold gauge. The ECODRY 40 and 65 plus variants have the lowest noise level in their class.
  • SCROLLVAC plus Dry Scroll Pumps: Universal dry roughing solutions with whisper-quiet, low-vibration operation in four sizes (SCROLLVAC 7, 10, 15 and 18 plus), single or three phase.
  • VARODRY and LEYVAC Dry Screw Pumps: Rugged dry screw pumps with no process oil migration, reaching ≤ 1 · 10⁻² mbar. VARODRY is fully air-cooled at 65 to 200 m³/h, and LEYVAC is hermetically sealed for hazardous gases at 80 to 160 m³/h.
  • Multi-VAControl & CAB Automation Modules: Intelligent electronic smart management frameworks that link multiple variable or fixed-speed pumps concurrently, optimizing energy usage on-demand via integrated PLC touch panels.
SOGEVAC rotary vane pump
SOGEVAC rotary vane pump
TRIVAC dual-stage rotary vane pump
TRIVAC dual-stage rotary vane pump
ECODRY plus dry roots pump
ECODRY plus dry roots pump
SCROLLVAC plus scroll pump
SCROLLVAC plus scroll pump
VARODRY dry screw pump
VARODRY dry screw pump
LEYVAC dry screw pump
LEYVAC dry screw pump
RUVAC roots pump
RUVAC roots pump
Multi-VAControl
Multi-VAControl

High Vacuum Pumps, Leak Detection, and Gas Analyzers

  • TURBOVAC i/iX Hybrid Bearing Turbomolecular Series: Advanced high-vacuum generators providing pumping speeds up to 1,450 l/s, utilizing mechanical/permanent magnetic hybrid bearing networks installable in any orientation.
  • PHOENIX 4 Helium Leak Detectors: The highest standard in helium leak detection components testing, for mobile or stationary vacuum and sniffer testing, with USB data logging, a colour touchscreen and an integrated webserver for secure Wi-Fi remote operation.
  • LEYSPEC Residual Gas Analyzers: All-in-one compact mass spectrometers tracking 100, 200, or 300 amu data blocks, mountable in any orientation with standalone on-board displays to spot trace chamber contamination. Bakeable up to 300°C; the LEYSPEC Cart adds its own SCROLLVAC 7 plus and TURBOVAC 350i pumping.
TURBOVAC i turbomolecular pump
TURBOVAC i turbomolecular pump
PHOENIX 4 leak detector on cart
PHOENIX 4 leak detector on cart
LEYSPEC Cart residual gas analyzer
LEYSPEC Cart residual gas analyzer
GRAPHIX vacuum controller
GRAPHIX vacuum controller

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